EntityQ1191918· pop 10· linked from 23 articlesDry etchingSign in to savecontrolled material removal, without the use of liquid substancesConnectionsplasma etchingEntityoxygenEntityheliumEntitynitrogenEntitychlorineEntityargonEntityplasmaEntityionEntitysemiconductorEntitydigital object identifierEntitysilicon carbideEntityMOSFETEntityanisotropyEntityradio frequencyEntitymicro-electromechanical systemsEntitysemiconductor deviceEntityphotolithographyEntitysemiconductor waferEntitygallium nitrideEntitysemiconductor device fabricationEntityCategoriesEtching (microfabrication)MicrotechnologySemiconductor device fabrication