wafer bonding
Sign in to savepackaging technology on wafer-level for the fabrication of microelectromechanical systems etc., ensuring a mechanically stable and hermetically sealed encapsulation
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- Wafer bonding
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International Standard Book Number
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digital object identifier
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integrated circuit
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microelectronics
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optoelectronics
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micro-electromechanical systems
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semiconductor wafer
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nanoelectromechanical system
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Wire bonding
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tape-automated bonding
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Thermocompression bonding
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