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gravure au plasma · Vinony

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Plasma processing
gravure au plasma

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EntityQ2392011· pop 9· linked from 63 articles

gravure au plasma

industrial process

Article · Français

La gravure au plasma est une technique de gravure sèche utilisée en microfabrication (microélectronique).

Abstract from DBpedia / Wikipedia · CC BY-SA

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Plasma processing Semiconductor device fabrication

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oxygen

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atmosphere of Earth

chemical reaction

digital object identifier

International Standard Serial Number

integrated circuit

silicon dioxide

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What links here63 pages

NAURA Technology Group

tungsten disilicide

failure analysis

boron trichloride

microfabrication

Plasma cleaning

polydimethylsiloxane

industrial etching

micro-electromechanical systems

tetrafluoromethane

Reactive-ion etching

Copper interconnect

deep reactive-ion etching

photolithography

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