EntityQ847609· pop 11· linked from 98 articlessputter depositionSign in to savemethod of thin film applicationConnectionshard diskEntityscanning electron microscopeEntitygoldEntityFormicidaeEntitysilverEntitycarbonEntityNASAConceptneonEntityglassEntitysiliconEntityargonEntityInternational Standard Book NumberEntitydiamondEntitykryptonEntityxenonEntitypalladiumEntitykelvinEntityplasmaEntityopticsEntityionEntityCategoriesPhysical vapor deposition techniquesPlasma processingSemiconductor device fabricationThin film deposition